Articles Service
Sputtering Target Characterization service
Sputtering Target Characterization, test items:
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Appearance Inspection of the sputtering surface of the target
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The number of particles and the number of abnormal discharge behaviors of plasma(Arcing)
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Sputtering current and voltage characteristic curve
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Target sputtering/film uniformity
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Target utilization rate
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Target scattering angle
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Thin film characteristics
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Other inspection items required by customers
